Systems of plasma separation
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| Curvilinear separator of plasma. Current efficiency 8...35%. |
Separator with transformation of oncoming flows into radial. Current efficiency up to 96%. |
Rectilinear separator of plasma. Current efficiency 10...15%. |
Rectilinear magnetoelectrical filter
a block diagram of the apparatus, the current efficiency 50%
Curvilinear L-shaped magnetoelectrical filter
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| Block diagram of facility | Coating without separation | Plasma source with curvilinear separator | Coating, obtained with separator |
Vacuum-arc source of plasma with T-shaped magnetic filter with two active arms
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| Sectional view of the source of separated plasma with T-shaped filter | Diadram of plasma source with T-shaped magnetic filter |
Radial distribution of components concentration and thickness of coating
Radial distribution of the rate of TiAlN coating deposition on different distance from plasma counduit exit
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| Radial apportionment of Al concentrations in TiAlN coatings different composition | Radial apportionment of speed sedimentation TiAlN coatings different composition |
Macroparticle tracer - program for calculation of the path of macroparticles motion in filtering systems of vacuum-arc plasma
green lines – paths of macroparticles absorbed by filter walls;
red lines – paths of macroparticles attaining the filter exit;
Number of macroparticle on filter exit is reduced by ~65 times.
Rib system for T-like magnetic filter
Dependence of number of macroparticles on number of collisions in filter exit. Blue line-classical toroidal filter, red lines – T-like filter (solid line – rib system with minimal complexity of construction, dotted line – with maximum degree of plasma cleaning.
