ISSPMT
Institute of Solid State Physics, Materials Science and Technologies
NAS of Ukraine

Equipment and technology for realization of vacuum-arc method


Developed with participation of workers of the department of "Ion-plasma treatment of materials"


Bulat-10

Bulat 10
Working zone into the installation:
Diameter x height
700х540
Total number of evaporator (pieces)
operating at the same time
9
9
Rate of deposition of coating (mkm/hour)
On immobile object

from 15
to 150
Purpose(type) of deposited coatings Wear-resistant,
Corrosion,
Protective-decorative,
Bacterical,
Optical.
Manner of control automatic

Bulat-9

Bulat-9
Working zone into the installation:
Diameter x height
600x600
Total number of evaporator (pieces)
operating at the same time
4
3
Rate of deposition of coating (mkm/hour)
On immobile object
On rotating object

40
30
Purpose(type) of deposited coatings Wear resistant,
Corrosion resistant,
Protective-decorative
Manner of control automatic

Bulat-МС

Bulat-МС
Working zone into the installation:
width x depth х height
400x400х100
0
Total number of evaporator (pieces)
operating at the same time
4
2
Performance (pc./shift)
100
30
Purpose(type) of deposited coatings Multilayer,
Self-carrying
wiith thickness to 2 mm.
Manner of control manual


Bulat-P

Bulat-П
Working zone into the installation:
diameter x height(mm)


500x500
Total number of evaporator (pieces)
operating at the same time
2
2
Rate of deposition of coating (mkm/hour)
On immobile object
On roating object


5
4
Production rate(pieces/shift) 4
Max. consumption capacity, kW 20
Water discharge, (1/hour) 1200
Purpose (type)of deposited coatings Protective,
Wear resistant,
Nitride,
Oxide,
Carbide (on precision articles).
Manner of control mannual



Type-5

Type-5
TYPE-4 TYPE-5 B-APP Bulat-10
Working zone into the installation:diameter x height (mm) 700х850 850х850 500х500 700х540
Total number of evaporator (pieces)
operating at the same time
4

2
6

3
2

1
9

9
Rate of deposition of coating (mkm/hour)
On immobile object
On rotating object


to 30

to 10


to 25

to 8


to 5

to 1,5


from 15

to 150
Purpose (type)of deposited coatings Protective-decorative Protective-decorative Wear-resistant,
Protective,
Antifriction, diamond-like
Wear-resistant,
Corrosion,
Protective-decorative,
Bacterical,
Optical.
Maner of control manual manual manual automatic

Equipment for synthesis of diamond films

for synthesis
Activation of gaseous phase is performed by glow discharge of direct current in crossed E/H fields;
Power of the source to 17 kW;
Voltage on discharge gap to 7 kV;
Discharge current to 10 A;
Intensity of megnetic field in the region of base ~250 E;
Rate of deposition to 10...12 mkm/hour;
Area of deposition of diamond polycrystalline coating to 25 cm2;
T° of deposition >900° C.

Installation with L-vivid filter

L-vivid filter
Intensity of megnetic field 350 E
Ion current on filter outlet too 2 А
High quality of plasma filtration:
Effective area of coating homogeneity: 10%
On diameter (without rotation of the base) 60-70 mm

Equipment for diagnostics


X-ray fluorescence analysis of mass composition (apparatus "SPRUT")

SPRUT
Set of apparatus SPRUT consists of:
Unit of spectrometer: 6
3
Unit of control and regulation of spectrum of gaseous station;
Forevacuum unit (block of pump and forevacuum pump control)
Source of uninterrupted power: 1500
External computer to 1.7 kV;

Nanoindentation (Nanoindenter G200)

nanoindentation
Resolving power of displacement lower 0.1 nm
Complete displacement of indenter 1.5 mm
Max. depth of indentation more: 500 mkm
Max. load: 500 mH
Max. power consumption (kVt): 35
Min depth of indentation sufficient for determination of hardness and of modulus of elasticity: ~30 nm
Optical microscope
Screen (digital) magnification: 25х
Optical magnification, 2 interchangeable lens: 10х and 40х

Measurement of corrosion characteristics (potentiometer IPC Pro MF)

potentiometer
Output voltage: 30 V
Current range: 7,
1 mkA,
10 mkA,
100 mA,
1 A,
10 mA,
100 mA,
1 A
Range of controlled potentials: 5 V
Sweep speed: from 0 to 100 V/s
Max. rate of registration IET: 10 ms/ternamy
IR compensation: Active on break in circuit
Output analog: there is
External set-point device: there is
Additional options: Internal memory, up 16000 points
Power supply: Circuit ~220 V
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