ISSPMT
Institute of Solid State Physics, Materials Science and Technologies
NAS of Ukraine

New systems for formation of plasma fluxes


With high coefficient of mass transfer of plasma forming material on article give the possibility to obtain mono and multilayer coatings with thickness to 1-2 mm.


Our equipment
cathode end nodes

Long-size cathodes:
Cylindrical - for deposition of coatings on inner surfaces of tubes, cones and so on,
Flat - for uniform treatment of large surfaces (the length of cathode has no principal limitations).

Chamber installation with planar cathode

Chamber with planar cathode

Катодный узел

Cathode unit of long-sized evaporator with cylindrical cathode


Complex treatment of articles
  1. Includes the ion nitriding in high density fluxes of plasma with the rate 10-150 mkm/hour, depth to 500 mkm and deposition of coating of necessary thickness.
  2. Increases the specified life of components and tools by 300-2000%.

Technology of multilayer films production
  • From metallic to any compositions of metals and their compound (of the type of oxides, of nitrides, carbides) with unique properties.
  • Guarantee high-efficiency increase of wear resistance and longevity of coated components.

Metallization of
Metallization
powders and polycrystalline grains of super hard materials including nature and synthetic diamonds (diameter 400 mkm and more).





Appearance and main characteristics of assembly with linear
assembly with linear
Diameter of cathode 60mm
Current of arc: 50-100А
Ion current outlet filter to:
Hight quality of plasma filtration
Rate of coatings deposition to: 18mkm/h
Effective area of coating homogeneity
on diameter 180 mm(without rotation of the base)
5%,
180mm


High quality of filtration illustrates the image of mark on the surface of the base of monocrystalline silicon before and after coating deposition: the film reproduces well pattern of the base.

Silicon base coating Ti with thickness 10 mk
Silicon base
without coating
the base with coating Ti
with thickness 10 mkm
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